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Solvent Monitoring for Industrial Applications
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The expertise of Medlight in medical diagnosis has been extended to industrial
applications such as the analysis of chemical products. Medlight has especially developed
analyzers for monitoring solvents used in semiconductor industry. They have been
designed at the request and in close collaboration with semiconductor manufacturers.
One result of this collaboration is the Wet Solvent Analyzer,
which optically measures the water content of several types of solvent (Patent pending):
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Wet Solvent Analyzer
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Off-Line Probe
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On-Line Probe
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In wafer process like "Photoresist Stripping" (BEOL) or "Post-Etch Residue" (Polymer Removal) the water concentration
is crucial. Low concentration in the solvent induces low efficiency of the process and high concentration may induce
corrosion problems. Stabilization of the water concentration is difficult due to natural evaporation, chemical
consumption, chemical degradation and sometimes due to water leaks in the process tool. Real time monitoring of the
water content in the solvent consequently allows the quality of the solvent to be guarantied and the production
yields to be increased (high efficiency of the process and no corrosion).
The lifetime of the solvent can be also highly improved (rapid return on investment).
Two different products are available: The Off-Line analyzer which measures the water content based on a 3ml sample. The On-Line analyzer which is designed for monitoring the solvent during the process in real-time. The probe is directly clamped on the pipe of the production tool. Similar instrument is available for monitoring Aceton concentration in IPA. Our technique can be applied for monitoring other chemical solutions. Please contact the company to discuss your application. |
